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Sensitive resonant gas sensor operating in air with metal organic frameworks coating

机译：具有金属有机框架涂层的空气中运行的灵敏共振气体传感器

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We report a practical resonant gas sensor that is uniformly coated with metal organic frameworks (MOFs) and excited near the higher order modes for a higher attained sensitivity. The resonator is based on an electrostatically excited clamped-clamped microbeam. The microbeam is fabricated from a polyimide layer coated from the top with Cr/Au and from the bottom with Cr/Au/Cr layer. The geometry of the resonator is optimized to reduce the effect of the squeeze film damping, thereby allowing operation under atmospheric pressure. The electrostatic force electrode is designed to enhance the excitation of the second mode of vibration with the minimum power required. Significant frequency shift (kHz) is demonstrated for the first time upon water vapor, acetone, and ethanol exposure due to the MOFs functionalization and the higher order modes excitation. Also, the adsorption dynamics and MOF selectivity is investigated by studying the decaying time constants of the response upon gas exposure.
机译：我们报告了一种实用的共振气体传感器，该传感器均匀地涂有金属有机框架（MOF），并在较高阶模式附近激发以获得更高的灵敏度。谐振器基于静电激发的夹钳式微束。微束由从顶部涂覆Cr / Au，从底部涂覆Cr / Au / Cr层的聚酰亚胺层制成。优化谐振器的几何形状以减少挤压膜阻尼的影响，从而允许在大气压下工作。静电力电极设计为以所需的最小功率增强第二种振动模式的激励。由于MOF的功能化和高阶模态激发，首次暴露于水蒸气，丙酮和乙醇时，频移（kHz）首次得到证明。此外，通过研究气体暴露时响应的衰减时间常数，研究了吸附动力学和MOF选择性。

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