Mask-/reticle-making control system

机译：口罩/光罩制作控制系统

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Abstract: The mask making is the first step in the semiconductor device manufacturing. It depends entirely upon mask delivery time whether it will take a short time or not to develop and produce the new devices. It is required to construct the system which can manage mask making and delivery quickly. It is very important to control the much various information on the many kinds of the mask for ASIC use quickly. It is also important to control the many various masks processing parameters, that is, to memorize the parameters and to use the appropriate parameters when the masks for general purpose device like a memory use are revised. The data base system to control the various information and parameters is requested from many mask makers and device ones. We have made a unitary data base including a large amount of information on the various ASIC devices and the various processing parameters of the memory devices, and information on the mask making progress, whereabouts of the masks. And we have constructed the new mask/reticle making control system using with the database.!0

机译：摘要：掩模的制造是半导体器件制造的第一步。开发和生产新设备是否需要很短的时间，完全取决于掩模的交付时间。需要构建可以快速管理口罩制作和交付的系统。快速控制用于ASIC的多种掩模上的多种信息非常重要。控制许多不同的掩膜处理参数，也就是记住这些参数，并在修改通用设备（如存储器使用）的掩膜时，使用适当的参数也很重要。许多掩模制造商和设备制造商都要求控制各种信息和参数的数据库系统。我们已经建立了一个统一的数据库，其中包含有关各种ASIC设备和存储设备的各种处理参数的大量信息，以及有关掩模制造进度，掩模下落的信息。并且我们已经使用数据库构建了新的光罩/掩模版制作控制系统。！0

著录项

来源
《Photomask and X-Ray Mask Technology II》|1995年|p.548-551|共4页
会议地点
作者
Satoshi Araihara; Fujitsu Ltd.; Kawasaki; Kanagawa; Japan; Satoshi Akutagawa; Fujitsu Ltd.; Kawasaki; Kanagawa; Japan; Itaru Sakai; Fujitsu VLSI Ltd.; Kasagai-shi; Aichi; Japan.;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类无线电电子学、电信技术;
关键词

相似文献

外文文献
中文文献
专利

1. A Comment on the Papers 'A Study on Controllability of Semilinear Integrodifferential Systems in Banach Spaces' and 'Controllability of Neutral Functional Integrodifferential Systems in Banach Spaces' [J] . E. Hernandez, M. Pierri, P. Taboas Computers & mathematics with applications . 2005,第8a9期

机译：评论论文“ Banach空间中半线性积分微分系统的可控性研究”和“ Banach空间中性功能积分微分系统的可控性”
2. SECOND-TIER SYSTEMS REFUGE LEGACY CONTROLS - Got an old control system? Look to second-tier control system vendors for a replacement [J] . Rich Merritt Control . 2005,第12期

机译：第二层系统的旧版控制-有旧的控制系统吗？向二级控制系统供应商寻求替代品
3. On controllability, near-controllability, controllable subspaces, and nearly-controllable subspaces of a class of discrete-time multi-input bilinear systems [J] . Tie Lin Systems and Control Letters . 2016,第Null期

机译：关于一类离散时间多输入双线性系统的可控制性，近可控制性，可控制子空间和近可控制子空间
4. Mask-/reticle-making control system [C] . Satoshi Araihara, Satoshi Akutagawa, Itaru Sakai Conference on Photomask and X-Ray Mask Technology . 1995

机译：屏蔽/掩盖控制系统
5. The effect of locus of control on achievement and preference in CAI tutorial systems which vary in terms of system control, learner control with coaching, and learner control with no coaching. [D] . Ferguson, Hal L. 1988

机译：控制源对CAI辅导系统中成绩和偏好的影响，这在系统控制，有辅导的学习者控制和无辅导的学习者控制方面有所不同。
6. XIII. Hospital Information Systems: F. Strategic Planning for Hospital Information Systems: A Method of Conducting Controlled Testing of Hospital Information System Components [O] . James E. Rusnak 1981

机译：十三。医院信息系统：F.医院信息系统的战略计划：进行医院信息系统组件的受控测试的方法
7. DIGITAL CONTROL SYSTEMS IMPLEMENTATION TECHNIQUES, VOLUME 70 OF CONTROL AND DYNAMIC SYSTEMS: ADVANCES IN THEORY AND APPLICATIONS, C. Leondes (ed), Academic Press, San Diego, 1995, 390 pp., ISBN 0-12-0127702, $99.00 DISCRETE-TIME CONTROL SYSTEM ANALYSIS AND DESIGN, VOLUME 71 OF CONTROL AND DYNAMIC SYSTEMS: ADVANCES IN THEORY AND APPLICATIONS, C. Leondes (ed), Academic Press, San Diego, 1995, 410 pp., ISBN 0-12-0127715, $99.00 DISCRETE-TIME CONTROL SYSTEM IMPLEMENTATION TECHNIQUES, VOLUME 72 OF CONTROL AND DYNAMIC SYSTEMS: ADVANCES IN THEORY AND APPLICATIONS, C. Leondes (ed), Academic Press, San Diego, 1995, 388 pp., ISBN 0-12-0127725, $99.00 TECHNIQUES IN DISCRETE-TIME STOCHASTIC CONTROL SYSTEMS, VOLUME 73 OF CONTROL AND DYNAMIC SYSTEMS: ADVANCES IN THEORY AND APPLICATIONS, C. Leondes (ed), Academic Press, San Diego, 1995, 380 pp., ISBN 0-12-0127734, $99.00 TECHNIQUES IN DISCRETE AND CONTINUOUS ROBUST SYSTEMS, VOLUME 74 OF CONTROL AND DYNAMIC SYSTEMS: ADVANCES IN THEORY AND APPLICATIONS, C. Leondes (ed), Academic Press, San Diego, 1995, 412 pp., ISBN 0-12-0127741, $99.00 [O] . D. SUBBARAM NAIDU 1997

机译：数字控制系统的实施技术，控制和动态系统的第70卷：理论和应用的进步，C.丝丝（ED），学术出版社，圣地亚哥，1995,390 PP，ISBN 0-12-0127702，99.00美元离散时间控制系统分析和设计，控制和动态系统的第71卷：理论和应用的进步，C.丝丝（ED），学术出版社，圣地亚哥，1995,410 PP，ISBN 0-12-0127715，99.00美元离散时间控制系统实现技术，控制和动态系统的第72卷：理论和应用的进步，C.丝丝（ED），学术出版社，圣地亚哥，1995,388 pp，ISBN 0-12-0127725，99.00美元的离散 - 时间随机控制系统，控制和动态系统的VOLUME 73：前进，理论与应用，C Leondes（ED），学术出版社，圣地亚哥，1995年，380页，ISBN 0-12-0127734，在离散和$ 99.00技术。连续稳健的系统，控制和动态系统的第74卷：理论和应用的进步，C. leondes（ed），学术出版社，圣地亚哥，1995,412 pp。，ISBN 0-12-0127741，99.00美元
8. Guide to Industrial Control Systems (ICS) Security. Supervisory Control and Data Acquisition (SCADA) Systems, Distributed Control Systems (DCS), and Other Control System Configurations such as Programmable Logic Controllers (PLC). Revision 2. [R] . Stouffer, K., Pillitteri, V., Lightman, S., 2015

机译：工业控制系统（ICs）安全指南。监控和数据采集（sCaDa）系统，分布式控制系统（DCs）和其他控制系统配置，如可编程逻辑控制器（pLC）。修订版2。

Mask-/reticle-making control system

摘要

著录项

相似文献

相关主题

期刊订阅