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64 x 64 128 x 128 240 x 320 pixel uncooled IR bolometric detector arrays

机译:64 x 64128 x 128240 x 320像素非冷却红外测辐射热探测器阵列

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Abstract: Several prototypes of individual VO$-2$/-based bolometric detectors and their arrays consisting of 64 by 64, 128 by 128 and 240 by 320 pixels are presented. The fabrication method and the device characterization results are described. Three types of readout integrated circuits for the arrays are also presented. A custom vacuum package for the IR bolometric detector arrays is descried. !4
机译:摘要:提出了几种基于VO $ -2 $ /的辐射热探测器的原型,以及它们的阵列,该阵列由64 x 64、128 x 128和240 x 320像素组成。描述了制造方法和器件表征结果。还提出了用于阵列的三种类型的读出集成电路。描述了用于红外辐射热检测器阵列的定制真空包装。 !4

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