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Effects of thickness and oxygen content on thermomechanical behavior of thin Cu films passivated with AlN

机译:厚度和氧含量对AlN钝化Cu薄膜热力学行为的影响

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The thermomechanical behavior of a Cu thin film can be dramatically influenced ("oxygen effect") by exposing the film to a small amount of air or oxygen prior to passivation. Film exposure is accomplished by breaking vacuum at some point prior to passivation. When the top surface is exposed immediately before passivation, the oxygen effect is produced when the passivation material is Si_3N_4, but no effect is seen with AlN passivations. However, the effect is seen in AlN passivated films when the Cu film surface is exposed to air or O_2 and additional Cu is deposited before passivation. This suggests that conditions at the film/passivation interface are an important factor in this anomalous plasticity effect. We have investigated the effects of film thickness and oxygen concentration on these behaviors by preparing films with different thicknesses and oxygen contents for thermomechanical analysis. The thermomechanical behavior is correlated with secondary ion mass spectrometry (SIMS) data that shows oxygen concentration vs. film depth. The presence of the "oxygen effect" in thermomechanical behavior is found to be correlated with an increased oxygen concentration near the film/passivation and film/barrier interfaces.
机译:通过在钝化之前将薄膜暴露于少量空气或氧气中,可以大大影响Cu薄膜的热机械性能(“氧效应”)。通过在钝化之前的某个时候破坏真空来完成胶片曝光。如果在钝化之前立即暴露顶表面,则当钝化材料为Si_3N_4时会产生氧效应,但AlN钝化则看不到任何效应。但是,当Cu膜表面暴露于空气或O_2且在钝化之前沉积了额外的Cu时,在AlN钝化膜中可以看到这种效果。这表明膜/钝化界面处的条件是这种异常可塑性效应的重要因素。我们已经通过制备具有不同厚度和氧气含量的薄膜进行热机械分析,研究了薄膜厚度和氧气浓度对这些行为的影响。热力学行为与二次离子质谱(SIMS)数据相关,该数据显示了氧气浓度与薄膜深度的关系。发现在热机械行为中“氧效应”的存在与膜/钝化和膜/屏障界面附近的氧浓度增加相关。

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