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首页> 外文会议>Conference on high-power laser ablation >Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition
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Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition

机译：石墨激光烧蚀动力学的飞行时间质谱研究：与类金刚石碳膜沉积的相关性

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Abstract: Time-of-flight mass spectrometry has been used to probe neutral and positive ionic species produced by laser ablation of a graphite target at 266, 355, 532, and 1064 nm. The arrival time distributions of major carbon species (C$- 3$/, C$+$PLU$/, and C$-3$/$+$PLU$/) at a deposition substrate, 45 mm from a target, were fitted with a thermal Maxwell-Boltzmann (MB) distribution or a shifted MB distribution with a narrower width. The characteristics of laser ablation with shorter-wavelength laser light are the formation of atomic carbon species with high kinetic energies and the promotion of their ionization. We discuss the generation process of C$+$PLU$/ and the formation of a tetrahedral amorphous carbon film with a high fraction of sp$+3$/ bonded carbon atoms.!8
机译：摘要：飞行时间质谱法已用于探测在266、355、532和1064 nm处激光烧蚀石墨靶所产生的中性和正离子物种。主要碳物种（C $ -3 $ /，C $ + $ PLU $ /和C $ -3 $ / $ + $ PLU $ /）到达距目标45毫米的沉积基底的到达时间分布为装有热麦克斯韦-玻尔兹曼（MB）分布或宽度较窄的位移MB分布。用短波长激光烧蚀的特征是形成具有高动能的原子碳物质并促进其电离。我们讨论了C $ + $ PLU $ /的生成过程以及具有高比例sp $ + 3 $ /键合碳原子的四面体无定形碳膜的形成！8

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