Undoped and Li-doped iron oxide thin films were investigated as humidity sensors. Large variations of the sensor resistance were observed by changing the relative humidity (RH%) between 0 and 100%. The results of an electrochemical impedance spectroscopy (EIS) study performed by measuring the sensor's complex impedance, were analyzed and employed to extract equivalent circuit models. Such models have humidity-dependent element values and their structure has a direct relationship with the sensor physics. The performance of the films and the results of the model simulations are presented and discussed.
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