Silica-on-silicon technology for photonic integrated devices

著录项

• 来源
  《Transparent Optical Networks, 2004. Proceedings of 2004 6th International Conference on》|2004年|p.274-279|共6页
• 会议地点
• 作者

  Wosinski L.;

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• 作者单位

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• 会议组织
• 原文格式 PDF
• 正文语种
• 中图分类 无线电电子学、电信技术;
• 关键词

  optical communication equipment; integrated optoelectronics; optical planar waveguides; plasma CVD; arrayed waveguide gratings; Bragg gratings; optical waveguide components; wavelength division multiplexing; optical sensors; silica-on-silicon technology; photonic integrated devices; silicon-based integrated devices; all-optical communication networks; photonic integration; monolithic integration; passive dielectric components; semiconductor active photonic devices; electronic circuits; low temperature plasma enhanced chemical vapor deposition; silica-based channel waveguide devices; imprinted Bragg gratings; wavelength-division multiplexing; WDM; wavelength-selective devices; optical sensing; biosensors; bioanalytical micro-techniques; arrayed waveguide gratings; SiO/sub 2/; Si;

  机译：光学通信设备;集成光电;光学平面波导;等离子CVD;阵列波导光栅;布拉格光栅;光学波导组件;波分复用;光学传感器;硅基硅技术;光子集成器件;硅基集成器件;所有-光通信网络;光子集成;单片集成;无源介电元件;半导体有源光子器件;电子电路;低温等离子体增强化学气相沉积;硅基通道波导器件;压印布拉格光栅;波分复用; WDM;波长选择器件;光学传感;生物传感器;生物分析微技术;阵列波导光栅; SiO / sub 2 /; Si;