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首页> 外文会议>Conference on Photomask Technology; 20060919-22; Monterey,CA(US) >The Automatic Back-Check Mechanism of Mask Tooling Database and Automatic Transmission of Mask Tooling Data
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The Automatic Back-Check Mechanism of Mask Tooling Database and Automatic Transmission of Mask Tooling Data

机译：掩模工具数据库的自动回检机制和掩模工具数据的自动传输

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Nowadays, most foundries have paid more and more attention in order to reduce the CD width. Although the lithography technologies have developed drastically, mask data accuracy is still a big challenge than before. Besides, mask (reticle) price also goes up drastically such that data accuracy needs more special treatments.We've developed a system called eFDMS to guarantee the mask data accuracy. EFDMS is developed to do the automatic back-check of mask tooling database and the data transmission of mask tooling. We integrate our own EFDMS systems to engage with the standard mask tooling system K2 so that the upriver and the downriver processes of the mask tooling main body K2 can perform smoothly and correctly with anticipation. The competition in IC marketplace is changing from high-tech process to lower-price gradually. How to control the reduction of the products' cost more plays a significant role in foundries. Before the violent competition's drawing nearer, we should prepare the cost task ahead of time.
机译：如今，大多数铸造厂已经越来越关注以减小CD宽度。尽管光刻技术得到了飞速发展，但是掩模数据的准确性仍然是比以前更大的挑战。此外，掩模（掩模版）价格也大幅上涨，因此数据准确性需要更多的特殊处理。我们开发了一种名为eFDMS的系统来保证掩模数据的准确性。 EFDMS的开发是为了进行掩模工具数据库的自动回溯检查以及掩模工具的数据传输。我们集成了我们自己的EFDMS系统，以与标准的口罩模具系统K2配合使用，从而使口罩模具主体K2的上游和下游过程能够在预期的情况下平稳，正确地执行。集成电路市场的竞争正在从高科技工艺逐渐转变为低价。如何控制产品成本的降低在铸造厂中起着举足轻重的作用。在激烈的竞争临近之前，我们应该提前准备费用任务。

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