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Thermal effects researching for laser microstructures synthesis by thermochemical circular laser writing

机译:热化学圆形激光写入合成激光微结构的热效应研究

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Features of thermal trace forming by thermochemical circular laser writing in chromium films on glass (quartz) substrates are considered on the basis of thermal equation system solution. Linear (thermal parameters do not dependence on temperature) and nonlinear (thermal parameters dependence on temperature) models are considered. It is showed that linear model is enough for thermal trace broads consideration. Calculation of thermal field is provided for wide range of linear scanning velocities (from 1.2 up to 9.4 m/sec). Dynamics of chromium film heating when laser beam is switched on is researched. Difference of the thermal trace form in switching on area and switching off area is showed. Also structures like chess board are synthesized for experimental investigation. Influence of thermal processes inertness on the broadband image parameters is considered on such samples experimentally. Recommendations for experimental selection of writing power have been done.
机译:在热方程系统解决方案的基础上,考虑了通过热化学圆形激光在玻璃(石英)基板上的铬膜上写入热痕迹形成的特征。考虑了线性(热参数不依赖于温度)和非线性(热参数不依赖于温度)模型。结果表明,线性模型足以满足热迹线的广泛考虑。提供了广泛的线性扫描速度(从1.2到9.4 m / sec)的热场计算。研究了激光束开启时铬膜加热的动力学。显示了接通区域和关断区域中的热迹线形式的差异。象棋盘这样的结构也被合成用于实验研究。实验中考虑了热过程惰性对宽带图像参数的影响。已经提出了对实验选择书写能力的建议。

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