Size effects of microstructure during plasma immersion ion implantation

机译：等离子体浸没离子注入过程中微观结构的尺寸效应

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Plasma immersion ion implantation (PBII) has been regarded as an effective tool to enhance surface properties. The implantation dynamics during plasma ion implantation of small component used in micro-electromechanical systems (MEMS) has seldom been investigated. Numerical simulation of PBII by Particle-in-cell/Monte Carlo collision method has been launched to understand the effect of small target dimension. As the characteristic size of the component decreases, the electric field strength near the top surface increases and the thickness of plasma sheath also decreases with a higher impact energy. In summary the implantation efficiency increases significantly.

机译：等离子体浸没离子注入（PBII）被认为是增强表面性能的有效工具。很少研究微机电系统（MEMS）中使用的小部件的等离子体离子注入过程中的注入动力学。为了了解小目标尺寸的影响，已经开始通过粒子内/蒙特卡洛碰撞法对PBII进行数值模拟。随着部件的特征尺寸减小，顶表面附近的电场强度增大，并且等离子体鞘的厚度也随着较高的冲击能而减小。总之，植入效率显着提高。

著录项

来源
《Nanoelectronics Conference (INEC), 2010》|2010年|p.1451-1452|共2页
会议地点
作者
Chunzhi Gong; Zhijian Wang; Xiubo Tian; Shiqin Yang;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类微电子学、集成电路（IC）;
关键词

相似文献

外文文献
中文文献
专利

1. Si含量对多元等离子体浸没离子注入与沉积技术制备TiAlSiN涂层微结构和机械性能的影响 [J] . 解志文, 王浪平, 王小峰, 中国有色金属学报（英文版） . 2011,第0z2期
2. Effect of cathode composition on microstructure and tribological properties of TiBN nanocomposite multilayer coating synthesized by plasma immersion ion implantation and deposition [J] . LÜ Wen-quan, CAO Yong-zhi, WANG Lang-ping, 中南大学学报（英文版） . 2017,第010期

机译：阴极组成对等离子浸没离子注入沉积TiBN纳米复合多层涂层微观结构和摩擦学性能的影响
3. The microstructure and mechanical properties of TiN and TiO2/TiN duplex films synthesized by plasma immersion ion implantation and deposition on artificial heart valve [J] . Leng YX, Chen JY, Yang P, Surface & Coatings Technology . 2006,第3a4期

机译：等离子体浸没离子注入并沉积在人工心脏瓣膜上合成的TiN和TiO2 / TiN双相膜的微观结构和力学性能
4. Effects of plasma immersion ion implantation of oxygen on mechanical properties and microstructure of Ti6Al4V [J] . Loinaz A., Alonso F., Onate JI., Surface & Coatings Technology . 1998,第0期

机译：等离子体等离子体氧注入对Ti6Al4V力学性能和微观结构的影响
5. Size effects of microstructure during plasma immersion ion implantation [C] . Chunzhi Gong, Zhijian Wang, Xiubo Tian, Nanoelectronics Conference (INEC), 2010 . 2010

机译：等离子体浸没离子注入过程中微观结构的尺寸效应
6. Separation by plasma implantation of oxygen with plasma immersion ion implantation to form silicon-on-insulator. [D] . Iyer, S. Sundar Kumar. 1998

机译：通过等离子体注入氧气和等离子体浸没离子注入进行分离，以形成绝缘体上硅。
7. The microstructure of Si surface layers after plasma-immersion He+ ion implantation and subsequent thermal annealing [O] . Andrey Lomov, Kirill Shcherbachev, Yurii Chesnokov, -1

机译：等离子体浸入He +离子注入和后续热退火后的Si表面层的微观结构
8. Now or Never. Plasma Based Ion Implantation for Three-Dimensional Surface Modification and Process. Development of Plasma Sources for Plasma Immersion Ion Implantation. [O] . 2001

机译：要么现在，要么别做。基于等离子体的三维表面改性和方法的离子植入。等离子体浸没离子植入等离子体源的发展。
9. Plasma Immersion Ion Implantation Process for Semiconductor Fabrication. LinearReentrant Crossed-Field Amplifiers for in situ Measurements, Comparisons with Numerical Simulations and Study of Noise Mechanisms [R] . Chan, C., Ye, J. 1996

机译：用于半导体制造的等离子体浸没离子注入工艺。用于原位测量的LinearReentrant交叉场放大器，与数值模拟的比较和噪声机制的研究

Size effects of microstructure during plasma immersion ion implantation

摘要

著录项

相似文献

相关主题

期刊订阅