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Electric directivity scanning using arrayed ultrasonic transmitter/receiver with parylene diaphragm

机译:电动方向性扫描使用与聚偶烯隔膜的阵列超声波发射器/接收器

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This paper reports the development of an arrayed device, which can act as both transmitter and receiver for ultrasonic pulses in the air. The device is composed of micromachined capacitive structures with Parylene diaphragms, each of which can generate large sound pressure and realize high sensitivity based on the non-brittle and flexible characteristics of polymer Parylene. By setting a delay time for each adjacent diaphragm, the control of transmitting and receiving directivity is successfully achieved.
机译:本文报告了一条阵列设备的开发,可以充当空气中超声波脉冲的发射器和接收器。该装置由微机械电容结构组成,具有聚对二甲苯膜片,每个结构可以产生大的声压,并基于聚合物聚乙烯的非脆性和柔性特性来实现高灵敏度。通过为每个相邻隔膜设定延迟时间,成功实现了发送和接收方向性的控制。

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