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首页> 外文会议>International Renewable and Sustainable Energy Conference >Deposition of transparent Aluminum Oxide (Al2O3) films on silvered CSP mirrors
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Deposition of transparent Aluminum Oxide (Al2O3) films on silvered CSP mirrors

机译：在镀银的CSP反射镜上沉积透明氧化铝（Al 2 O 3 ）膜

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This work consists on the improvement of first surface silvered thick glass mirrors. Several types of CSP mirrors based on different Physical Vapor Deposition techniques (PVD) and the presence or absence of the copper protective back layer were prepared: ([Ag Sputtered], [Ag Evaporated], [Cu Sputtered-Ag Evaporated], [Cu Evaporated-Ag Sputtered], [Cu Evaporated-Ag Evaporated] and [Cu Sputtered-Ag Sputtered]). The UV-VIS-NIR measurements have shown that the different combinations of Silvered mirrors have approximately the same Specular Reflectance. The mirrors with the Copper back protective layer were chosen as the optimal mirror combinations since the [Ag-Evaporated] and the [Ag-Sputtered] mirrors presented stability and adhesion problems during the top protective layer deposition process. A transparent Aluminum Oxide (AlO) protective layer was deposited on top of the selected mirrors using Dip-coating and Ion Layer Gas Reaction (Spray-ILGAR) deposition techniques. After the deposition of the protective layer, the optical properties, thickness, composition and surface morphology of the mirrors were tested. The results showed that the Specular Reflectance decreased after the deposition of AlO layer by Dip-coating technique. On the other hand, an improvement in the Specular Reflectance of the [Cu Sputtered-Ag Sputtered] mirror was noticed after the deposition of AlO with the ILGAR technique. An increase in the diffuse reflectance after the deposition of the AlO protective layer by ILGAR method was also observed, this can be explained by the presence of some roughness on the surface of the mirror, which was confirmed by the SEM pictures. From these results, it can be concluded that the AlO protective layer deposition by ILGAR technique is a very promising technique since enhances the specular reflectance of the mirrors. The final prepared mirror com- ination is composed of thick glass substrate, covered with a metal back layer of Sputtered Copper (50 nm), a reflective layer of Sputtered Silver (100 nm) deposited on top of the Copper layer, and a top protective layer of AlO deposited by Spray-ILGAR technique.
机译：这项工作包括改进第一面镀银厚玻璃镜。基于不同的物理气相沉积技术（PVD）以及有无铜保护背层，制备了几种类型的CSP反射镜：（[Ag溅射]，[Ag蒸发]，[Cu Sputtered-Ag蒸发]，[Cu蒸镀银]，[蒸镀铜和镀银]。 UV-VIS-NIR测量表明，镀银镜的不同组合具有近似相同的镜面反射率。选择具有铜后保护层的反射镜作为最佳反射镜组合，因为在顶部保护层沉积过程中，[Ag蒸发的]和[Ag-溅射的]反射镜存在稳定性和粘附性问题。使用浸涂和离子层气体反应（Spray-ILGAR）沉积技术，将透明的氧化铝（AlO）保护层沉积在所选反射镜的顶部。在沉积保护层之后，测试反射镜的光学性质，厚度，组成和表面形态。结果表明，通过浸涂技术沉积AlO层后，镜面反射率降低。另一方面，在用ILGAR技术沉积AlO之后，注意到[Cu溅射Ag溅射]镜的镜面反射率的改善。还观察到通过ILGAR方法沉积AlO保护层之后的漫反射率增加，这可以通过在镜表面上存在一些粗糙度来解释，这由SEM照片证实。从这些结果可以得出结论，通过ILGAR技术沉积AlO保护层是一种非常有前途的技术，因为它可以提高反射镜的镜面反射率。最终准备的镜面组合由厚玻璃基板组成，该基板上覆盖着一层溅射铜（50 nm）的金属背层，一层沉积在铜层顶部的溅射银（100 nm）的反射层以及一个顶部保护层通过喷雾-ILGAR技术沉积的AlO层。

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