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Precise tracking control for piezo-actuated stage using inverse compensation and model predictive control

机译：使用逆补偿和模型预测控制的压电驱动平台精确跟踪控制

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摘要

In this paper, we consider tracking control problem of piezo-actuated stage which is composed by a piezoelectric actuator (PEA) and a positioning mechanism (PM). This plant can be modeled by cascading a hysteresis with a linear dynamical system. The tracking performance of this system is significantly affected by hysteresis phenomenon of PEA. In order to improve the performance, a modified Bouc-Wen model is proposed to describe the hysteresis more accurately. Then, inverse Bouc-Wen is used to compensate hysteresis nonlinearity. Finally, model predictive control (MPC) with integral of error state variable is employed for control design. Experimental results show that the proposed method has excellent tracking performance in comparison with conventional proportional-integral (PI) controller.
机译：在本文中，我们考虑由压电致动器（PEA）和定位机构（PM）组成的压电致动平台的跟踪控制问题。可以通过将滞后与线性动力学系统级联来对这种植物进行建模。该系统的跟踪性能受PEA滞后现象的影响很大。为了提高性能，提出了一种改进的Bouc-Wen模型来更准确地描述磁滞。然后，使用逆Bouc-Wen补偿滞后非线性。最后，将具有误差状态变量积分的模型预测控制（MPC）用于控制设计。实验结果表明，与常规比例积分（PI）控制器相比，该方法具有优良的跟踪性能。

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