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Integrated of IDEs with TiO2 nanoparticles thin films for pH sensor

机译：将IDE与TiO2纳米颗粒薄膜集成在一起以用于pH传感器

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The combination of nano/micro technology, biology and metal oxides materials have seen great advances in the development of transducers and biochips for biological and medical fields. In this work, TiO nanoparticles thin films were prepared using sol-gel method and annealed at 400°C to promote nanoparticles crystallization in anatase phase. The influence of surface topologies and uniformity distribution of TiO thin films were investigated using AFM, whereby the surface structural was determined by XRD. The conventional photo-lithography technique was applied in the fabrication of micro-gap interdigitated electrodes (IDEs) with 7 μm gap size between the adjacent fingers. This device will be employed as an electrochemical sensor to detect the bio-molecules thru electrical characteristics. The fabricated micro-gap Au/Ti IDEs gap size was further inspected using the scanning electron microscopy (SEM). Purchased pH buffer solutions which varied from pH4 to pH 12 is dropped on the micro-gap IDEs and the effect on it is investigated for the application in pH measurement.
机译：纳米/微技术，生物学和金属氧化物材料的结合在用于生物和医学领域的换能器和生物芯片的开发中已取得了巨大的进步。在这项工作中，使用溶胶-凝胶法制备了TiO2纳米颗粒薄膜，并在400°C退火以促进纳米颗粒在锐钛矿相中结晶。利用原子力显微镜研究了表面形貌和TiO薄膜均匀性的影响，并通过XRD确定了其表面结构。将传统的光刻技术应用于微指叉电极（IDE）的制造中，相邻指之间的间隙尺寸为7μm。该装置将用作电化学传感器，以通过电学特性检测生物分子。使用扫描电子显微镜（SEM）进一步检查了制造的微间隙Au / Ti IDE的间隙尺寸。将购买的pH缓冲溶液（pH范围从pH4到pH 12）滴加到微间隙IDE上，并对其影响进行了研究，以用于pH测量。

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