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Preparation and Properties of All-solid-state Inorganic Thin Film Glass/ITO/WO_3/LiNbO_3/NiO_x/ITO Electrochromic Device

机译:全固态无机薄膜玻璃/ ITO / WO_3 / LiNbO_3 / NiO_x / ITO电致变色器件的制备及性能

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The all-thin-film inorganic electrochromic device (ECD) with LiNbO_3 as the ion conductor layer was prepared. The ECD was fabricated monolithically in a same vacuum chamber layer by layer using DC reactive sputtering for WO_3, NiO_x and ITO, and radio frequency (RF) sputtering for LiNbO_3. The properties and performance of WO_3 thin film and the ECD were studied through X-ray diffraction (XRD), scanning electron microscopy (SEM), and ultraviolet-visible spectrometry. WO_3 thin film has more than 60% optical modulation with porous amorphous structure. The visible transmittance modulation of the ECD is more than 65%, and the response time of coloring and bleaching are 45 s and 25 s, respectively.
机译:制备了以LiNbO_3作为离子导体层的全薄膜无机电致变色器件(ECD)。使用针对WO_3,NiO_x和ITO的DC反应溅射和针对LiNbO_3的射频(RF)溅射,在同一真空室中逐层制造ECD。通过X射线衍射(XRD),扫描电子显微镜(SEM)和紫外可见光谱法研究了WO_3薄膜和ECD的性能。 WO_3薄膜具有60%以上的光学调制,具有多孔非晶结构。 ECD的可见光透射率调制超过65%,着色和漂白的响应时间分别为45 s和25 s。

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