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Analysis of the mechanical vibration and acoustic behavior of a piezoelectric MEMS microspeaker

机译：压电MEMS微型扬声器的机械振动和声学行为分析

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摘要

This paper investigates the performance of a piezoelectric MEMS-bascd microspeaker. The performance is compared to the state of the art in terms of electrodynamic microspeakers for mobile applications. The analysis is twofold: First, the mechanical behavior is evaluated using laser interferometry and discussed for different stimuli such as sine sweeps or static sinusoidal excitation. Second, the acoustic performance is assessed by way of measurements under anechoic conditions. Results show that the speaker performs well for its size while providing low power consumption. However, in order to achieve high broadband reproduction quality, further design improvements arc necessary.
机译：本文研究了压电MEMS-BASCD MICROPEARER的性能。在用于移动应用的电动微型烧点方面，该性能与用于移动应用的电动力学微秒相比。分析是双重的：首先，使用激光干涉测量评估机械行为，并讨论不同刺激，例如正弦扫描或静态正弦激发。其次，通过在化学成交条件下测量来评估声学性能。结果表明，扬声器在提供低功耗的同时表现良好的尺寸。但是，为了实现高宽带再现质量，进一步设计改进必要。

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