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Polarization point diffraction interferometry based on an even aspheric quarter-wave plate

机译：基于非球面四分之一波片的偏振点衍射干涉仪

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The point diffraction interferometer (PDI), emerging spherical wave used as the reference wave, is one of potential wavefront testing tools with very high accurate. However, it is not feasible in the in situ measurement of the surface error in the polishing process. For the test mirror with low reflectivity, the poor fringe contrast would be formed. It could increase the phase noise, which can't be removed during phase retrieval, thus limiting the measurement accuracy. Therefore, the polarization point diffraction interferometry (PPDI) with even aspheric quarter-wave plate (EAQWP) is proposed for high-precision testing of the high-NA spherical mirror. The EAQWP is employed in the PPDI to transform the polarization states of the test and reference beams, then a good fringe contrast can be realized by adjusting the relative intensities of two interfering waves. Compared with the common quarter-wave plate (QWP). the substrate configuration of designed even aspheric surface reduces significantly the introduced wavefront distortion for large-NA measurement, at the same time, allows to use the same position and orientation of the EAQWP for testing mirrors with different NAs, which facilitates the system alignment in practical optical shop testing. Most importantly, the corresponding pose errors are corrected by computer-aided alignment with a difference restoration model. The viability of the new method and system are verified with an experiment for testing a spherical mirror with 0.04 reflectivity and 0.5 NA, and with a ZYGO interferometer match.
机译：点衍射干涉仪（PDI）是新兴的球面波，用作参考波，是潜在的波前测试工具之一，具有很高的精度。但是，在抛光过程中原位测量表面误差是不可行的。对于反射率低的测试镜，会形成差的条纹对比度。这可能会增加相位噪声，而相位噪声在相位恢复期间无法消除，从而限制了测量精度。因此，提出了具有非球面四分之一波片（EAQWP）的偏振点衍射干涉仪（PPDI），用于高NA球面镜的高精度测试。 PPDI中使用EAQWP来转换测试光束和参考光束的偏振态，然后可以通过调整两个干扰波的相对强度来实现良好的条纹对比度。与普通的四分之一波片（QWP）相比。设计均匀的非球面表面的基板配置大大降低了大NA测量所引入的波前畸变，同时允许使用与EAQWP相同的位置和方向来测试具有不同NA的反射镜，从而有助于在实际中进行系统对准眼镜店测试。最重要的是，相应的位姿误差是通过计算机辅助校准与差异恢复模型进行校正的。通过测试具有0.04反射率和0.5 NA且与ZYGO干涉仪匹配的球面镜的实验，验证了新方法和系统的可行性。

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