首页> 外文会议>Electronic Components and Technology Conference, 1995. Proceedings., 45th >Optical device module packages for subscriber incorporating passivealignment techniques
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Optical device module packages for subscriber incorporating passivealignment techniques

机译:用于用户的无源光设备模块封装对准技术

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Compact optical module packages for use as 156 Mbps opticalinterfaces have been developed by incorporating passive alignmenttechniques. In this approach, a laser chip and a fiber are aligned on aV-grooved silicon substrate by flip-chip bonding. The silicon substrateshave been fabricated by conventional silicon processing andmicro-machining technologies. A new feature of our fabrication techniqueis to implement a self-alignment principle for the formation ofV-grooves and solder bumps, which eliminates a registration error fromthe individual process. The laser diode and photo diode submodules,assembled on silicon substrates, exhibited 4-6% and about 80% couplingefficiencies, respectively. The fabricated proto-type transmitter andreceiver module packages have a very compact size of 5 cc each andshowed adequate performance satisfying the requirement for opticalsubscriber transmitter and receiver modules
机译:紧凑的光模块封装,用作156 Mbps的光 通过结合被动对准来开发接口 技术。在这种方法中,将激光芯片和光纤对准 通过倒装芯片键合在V形沟槽的硅基板上硅基板 已经通过传统的硅加工工艺制成, 微加工技术。制造技术的新功能 实施自我调整原则以形成 V型槽和焊锡凸块消除了配准误差 个别过程。激光二极管和光电二极管子模块, 组装在硅基板上,表现出4-6%和约80%的耦合 效率分别。预制的原型发射机和 接收器模块包装的尺寸非常紧凑,每个包装均为5 cc,并且 显示出满足光学要求的足够性能 用户发送器和接收器模块

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