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A Circuit Compatible Accurate Compact Model for Ferroelectric-FETs

机译:铁电FET的电路兼容精确紧凑模型

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In this work we develop a compact model of ferroelectric field-effect-transistors (FeFET) for memory applications, enabling their exploration at the circuit and architecture level. In contrast to Landau-Khalatnikov (L-K) based approaches, the presented model is founded on the combination of a nucleation dominated multi-domain Presiach theory of ferroelectric switching with a conventional transistor model. The model successfully reproduces the evolution of the FeFET memory window as a function of the program and erase conditions (amplitude, pulse width, and history). To calibrate the model, we fabricated 10nm thick Hf0.4Zr0.6O2 (HZO) MFM capacitors and FeFETs and characterized the polarization switching dynamics. Our results highlight the importance of accounting for the switching history, minor loop trajectory, and coupled time-voltage response of the ferroelectric to quantitatively reproduce the measured FeFET characteristics.
机译:在这项工作中,我们开发了一种用于存储器应用的紧凑型铁电场效应晶体管(FeFET)模型,从而使它们能够在电路和架构级别上进行探索。与基于Landau-Khalatnikov(L-K)的方法相反,该模型基于铁电开关的成核控制多域Presiach理论与常规晶体管模型的结合而建立。该模型成功地复制了FeFET存储器窗口随编程和擦除条件(幅度,脉冲宽度和历史记录)的变化。为了校准模型,我们制造了10nm厚的Hf 0.4 0.6 Ø 2 (HZO)MFM电容器和FeFET,并描述了极化开关的动态特性。我们的结果强调了考虑到开关历史,较小的环路轨迹以及铁电体的耦合时间-电压响应以定量地重现所测量的FeFET特性的重要性。

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