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首页> 外文会议>International Conference on Advances in Electrical, Computing, Communications and Sustainable Technologies >RF and Electromechanical Characteristics of Serpentine Cantilever Structure Based MEMS switch
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RF and Electromechanical Characteristics of Serpentine Cantilever Structure Based MEMS switch

机译：基于蛇纹石悬臂结构的MEMS开关的RF和机电特性

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摘要

The MEMS switch have gained paramount importance in various applications including reconfigurable antenna. The high actuation voltage could be reduced and device could be made small using electrostatic actuation. The proposed electrostatic MEMS switch is based on serpentine cantilever beam structure with bottom electrode. The mechanical pull-in voltage is calculated analytically and through simulation. The minimum pull-in voltage obtained is 7.3V for the serpentine cantilever beam with Aluminum as the material. The MEMS switch could be used in the frequency range of 1GHz to 10GHz for less insertion loss and return loss.
机译：MEMS交换机在包括可重新配置天线的各种应用中获得最重要的重要性。可以减少高致动电压，并且可以使用静电致动来使装置很小。所提出的静电MEMS开关基于具有底电极的蛇形悬臂梁结构。通过模拟计算机械拉压电压。获得的最小拉伸电压为7.3V，用于铝制悬臂梁作为材料。 MEMS开关可以在1GHz到10GHz的频率范围内使用，以便更少插入损耗和返回损耗。

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