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Defects of 6H-SiC substrates made by Acheson's method and by modified Lely's method

机译:ACHESON方法和修饰依靠方法制造的6H-SIC基材的缺陷

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We have observed two types of defects in the 6H-SiC single crystals made by Acheson's and modified Lely's methods. One is micro-pores and the other is micro-chimneys. Micro-pores are observed in both substrates but micro-chimneys are only observed in the modified Lely's SiC substrates. Strong strain which appeared around micro-chimneys was characterized by a polarizing optical microscope. Unique interference patterns caused by strain have been found around the chimneys. A clarification of the origin of the strains will contribute to the growth of 6H-SiC crystals with better crystallinity. From the viewpoint of crystallinity, Acheson's SiC single crystals were better than that of modified Lely's method.
机译:我们在Acheson和改进的李的方法制作的6H-SIC单晶中观察到两种类型的缺陷。一个是微孔,另一个是微烟囱。在两个基板中观察到微孔,但仅在改性纤维的SiC基板中观察到微烟囱。在微烟囱周围出现的强菌株的特征在于偏振光光学显微镜。在烟囱周围发现了由菌株引起的独特干涉模式。澄清菌株的起源将有助于6h-SiC晶体的生长,具有更好的结晶度。从结晶度的角度来看,Acheson的SiC单晶优于改性李的方法。

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