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Stress state of CVD TiCN/κ-Al_2O_3 hard coatings

机译：CVD TICN /κ-AL_2O_3硬涂层应力状态

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TiCN/Al_2O_3 hard coatings grown by chemical vapour deposition (CVD) are frequently utilized as wear resistant coatings on cemented carbide cutting tools. The stress state in the surface design of the tool i.e. substrate and coating architecture is considered as crucial for its performance. Therefore, three differently designed κ-Al_2O_3 layers were deposited using an industrial-scale low-pressure CVD system onto a defined TiCN base layer, i.e. two single κ-Al_2O_3 layers, with and without TiCN/TiN top coating, as well as a multilayer oxide arrangement with TiN/TiNB interlayer. The top coating comprises a sequence of TiCN and TiN layers. Microstructural and stress analysis was done by X-ray diffraction (XRD) and showed significant differences depending on the coating architecture. Single layer oxide and multilayer oxide coatings showed comparable stress profiles whereas a decrease of tensile stresses for the top coating architecture, caused by an intense crack network and compressive stress in the uppermost region were measured. This can be explained by the thermal mismatch of the TiN and κ-Al_2O_3 layers. The surface topography as well as fracture cross-sections were investigated by scanning electron microscopy (SEM) and show the grain-fining effect of the multilayer oxide arrangement. The chemical composition of the multilayer oxide was analysed by glow discharge optical emission spectroscopy (GDOES), excluding boron diffusion from the interlayer into the base layer or cemented carbide interface. The cutting performance was determined for the three different coating systems in turning and milling operations. In turning, all layer architectures showed comparable lifetime, whereas the milling operation is more sensitive on the stress state of the coating. There, the reduced tensile or even compressive stresses of the coating architecture with TiCN/TiN top coating led to an improvement of durability in interrupted cutting operation.
机译：通过化学气相沉积（CVD）生长的TiCN / Al_2O_3硬涂层经常用于耐硬质合金切削刀具上的耐磨涂层。工具表面设计中的应力状态是基板和涂层结构被认为是至关重要的。因此，使用工业规模的低压CVD系统沉积三种不同设计的κ-Al_2O_3层，在定义的TiCN基础层上，即两个单一κ-AL_2O_3层，有和没有TICN / TIN顶部涂层，以及多层氧化物布置与锡/锡中间层。顶涂层包含一种TiCN和锡层序列。通过X射线衍射（XRD）完成微观结构和应力分析，并根据涂层架构显示出显着的差异。单层氧化物和多层氧化物涂层显示出可比较的应力分布，而通过强烈的裂缝网络和最上部区域中的压缩应力引起的顶部涂层架构的拉伸应力降低。这可以通过锡和κ-al_2O_3层的热失配来解释。通过扫描电子显微镜（SEM）研究了表面形貌以及断裂横截面，并显示了多层氧化物布置的颗粒染料效应。通过辉光放电光学发射光谱（GdOE）分析多层氧化物的化学组成，不包括从中间层的硼扩散到基础层或硬质合金界面中。在转动和研磨操作中针对三种不同的涂层系统测定切割性能。在转弯时，所有层架构都显示出可比的寿命，而铣削操作对涂层的应力状态更敏感。在那里，具有TiCN / TIN顶部涂层的涂层结构的减小的拉伸或甚至压缩应力导致了中断切削操作中的耐用性的提高。

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