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Target Life KWatt-Hours vs. Target Depth Study on Multipurpose Roll to Roll Web Coaters

机译：目标寿命千瓦时与目标深度研究滚动网涂布器

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Target life measurements are of special interest in determining and controlling costs associated with sputter depositing high value materials roll to roll. Determining maximum target life and maximizing target utilization are especially important when depositing precious metals, such as Au, Pt, Ir, and Pd. The relationship between target life in KWatt-Hours (KWH) and erosion through a target can be determined for various cathode and target configurations and a mathematical model developed to assist in determining target life.

机译：目标寿命测量对于确定和控制与溅射沉积的高价值材料卷卷相关的成本特别令人兴趣。在沉积贵金属时，确定最大目标寿命和最大化目标利用尤其重要，例如Au，Pt，IR和Pd。对于各种阴极和目标配置，可以确定KWATT小时（kWh）和侵蚀通过目标的侵蚀之间的关系，以及开发的数学模型，以帮助确定目标寿命。

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《Annual SVC Technical Conference》|2011年||共3页
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K. P. Barnes;
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中图分类 TG174.44-53;
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Target Life KWatt-Hours vs. Target Depth Study on Multipurpose Roll to Roll Web Coaters

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