Target life measurements are of special interest in determining and controlling costs associated with sputter depositing high value materials roll to roll. Determining maximum target life and maximizing target utilization are especially important when depositing precious metals, such as Au, Pt, Ir, and Pd. The relationship between target life in KWatt-Hours (KWH) and erosion through a target can be determined for various cathode and target configurations and a mathematical model developed to assist in determining target life.
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