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首页> 外文会议>International Congress on Applications of Lasers Electro-Optics >Laser Direct Writing of Multifunctional Micro/nano Devices using Carbon Nanotube-polymer Composites
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Laser Direct Writing of Multifunctional Micro/nano Devices using Carbon Nanotube-polymer Composites

机译：使用碳纳米管 - 聚合物复合材料激光直接写多功能微型/纳米装置

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To unleash the full potential of two-photon polymerization (TPP) as a promising technique for three-dimensional (3D) fabrication of functional micro/nanostructures, multi-walled carbon nanotubes (MWNT) as filling materials were incorporated into polymer resins. Scanning electron microscopy images and polarized Raman spectra showed that the MWNTs with concentrations up to 0.2 wt% were uniformly distributed throughout the polymer matrix by thiol functionalization. A near-infrared femtosecond pulsed laser beam was focused into the composite resins, resulting in the 3D fabrication of arbitrary micro/nano architectures. The obtained MWNT-thiol-acrylate (MTA) composite structures exhibited significantly enhanced electrical conductivity and mechanical strength, and maintained high optical transmittance at the same time. Furthermore, MWNTs were self-aligned along the laser scanning direction in thiol-acrylate polymer, resulting in high electrical anisotropic effect of the MTA composites. Based on this highly conductive MTA composite photoresist, various functional micro/nano architectures and devices have been successfully fabricated, including photonic crystals, micromodels, microcapacitors and microresistors. Precise assembly of MWNTs with ～100 nm spatial resolution was achieved by the combination of TPP and direct pyrolysis. This technique enables 3D precise printing of multifunctional micro/nano devices and holds great potential to pave a way for wide applications of carbon nanotubes, such as 3D electronics, integrated photonics and micro/nanoelectromechanical systems (MEMS/NEMS).
机译：为了释放双光子聚合（TPP）作为具有功能性微/纳米结构的三维（3D）制备的有希望的技术的充分电位，将多壁碳纳米管（MWNT）作为填充材料掺入聚合物树脂中。扫描电子显微镜图像和偏振拉曼光谱表明，通过硫醇官能化均匀地分布浓度高达0.2wt％的MWNT。近红外飞秒脉冲激光束聚焦到复合树脂中，导致任意微/纳米架构的3D制造。所获得的MWNT-硫醇 - 丙烯酸酯（MTA）复合结构表现出显着增强的导电性和机械强度，并同时保持高光学透射率。此外，MWNT沿着硫醇丙烯酸酯聚合物中的激光扫描方向自对准，导致MTA复合材料的高电各向异性效应。基于该高导电的MTA复合光致抗蚀剂，已经成功制造了各种功能性微/纳米架构和装置，包括光子晶体，微模尔，微电流器和微电阻器。通过TPP和直接热解的组合实现了具有〜100nm空间分辨率的MWNT精确组装。该技术使多功能微/纳米器件的3D精确地印刷能够为碳纳米管（例如3D电子，集成光子和微/纳米机电系统（MEMS / NEM）提供宽采的潜力。

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