A combined x-ray interferometer and scanning tunnelling microscope for the characterization of grating structures

机译：一种组合的X射线干涉仪和扫描隧穿显微镜，用于表征光栅结构

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A monolithic x-ray interferometer and a scanning tunnelling microscope (STM) have been combined as one instrument and used to calibrate grating structures with periodicities of 100 nm or less. The x-ray interferometer is used as a translation stage which moves in discreet steps of 0.192 nm, the lattice spacing of the silicon (220) planes. Hence movements are traceable to the definition of the metre and are free from the non-linearity associated with optical interferometers used to measure displacement in more conventional metrological scanning probe microscopes (MSPMs).

机译：单片X射线干涉仪和扫描隧穿显微镜（STM）已作为一种仪器组合，用于校准具有100nm或更小的周期性的光栅结构。 X射线干涉仪用作在硅（220）平面的裂缝步长的转换级，其晶格间距移动。因此，运动可追溯到仪表的定义，并且没有与用于测量更传统的计量扫描探针显微镜（MSPM）中的位移的光学干涉仪相关的非线性。

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《European society for precision engineering and nanotechnology International Conference, european society for precision engineering and nanotechnology》|2001年||共4页
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4. A combined x-ray interferometer and scanning tunnelling microscope for the characterization of grating structures [C] . A. Yacoot, L. Koenders, U. Kuetgens, 2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy . 2001

机译：结合X射线干涉仪和扫描隧道显微镜对光栅结构进行表征
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A combined x-ray interferometer and scanning tunnelling microscope for the characterization of grating structures

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