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Nanophase Ferroelectric Ceramic Memories

机译:Nanophase铁电陶瓷记忆

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Nanophase ceramic ferroelectric thin films are under development as prototypes for Gbit nonvolatile computer memories. Devices have been made as small as 75 x 75 nm. We review recent progress and the present status of this technology, for both e-beam direct writing and spontaneous self-patterning. One of the most important steps was the discovery that the coercive field is independent of lateral size down to 100 nm in PZT. Emphasis will be on unsolved problems and puzzles: a) Why is the leakage current J(V) = aV~2 in small-area films but Schottky-dominated in large-area devices of the same material? A related question is "How small must a ferroelectric be in order for it to display point-contact space-charge limited currents of form J(V) = aV~(3/2) ?" b) Is there any evidence for confinement energies in nanophase ferroelectric films?
机译:纳比陶瓷铁电薄膜正在开发为Gbit Nonvolatile计算机存储器的原型。设备已成为75 x 75nm的小。我们审查了最近的进展和本技术的现状,因为电子束直接写作和自发自我图案化。最重要的步骤之一是发现矫顽场与PZT中横向尺寸无关。重点将在未解决的问题和谜题上:a)为什么漏电流J(v)=在小面积薄膜中的AV〜2,但在相同材料的大区域设备中肖特基主导?相关问题是“铁电必须为其进行多么小,以显示j(v)= av〜(3/2)的点 - 接触空间电荷有限电流?” b)纳比铁电薄膜中有禁闭能量是否有任何证据?

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