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首页> 外文会议>IEEE International Conference on Micro Electro Mechanical Systems >A novel single-layer Bi-directional out-of-plane electrothermal microactuator
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A novel single-layer Bi-directional out-of-plane electrothermal microactuator

机译：一种新型单层双向外电热热量微致动器

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摘要

In this study, a novel bi-directional out-of-plane electrothermal actuator is designed and fabricated. Unlike the bi-nietal and hot-cold arm thermal actuator, this actuator can move in two directions. Since this actuator is consisted of only single layer thin film material, it can prevent from delamination. According to the static loaddeflection test, this actuator can achieve bi-directional actuation with amplitude near several micros when driven at 5V. According to the vibration test, the dynamics of the actuator is influenced not only by the thermal characteristics but also by the vibration modes. Consequently, the thermal actuator still has a significant output when driven near 40 kHz. The actuator were experienced a fatigue test which shows that its resonant frequency remains unchanged after 10{sup}9 cycles of continuous operation with driving voltage at 2.25 V{sub}(pp).
机译：在该研究中，设计和制造了一种新型双向外电热致动器。与双态和热冷臂热执行器不同，该执行器可以两侧移动。由于该执行器仅由单层薄膜材料组成，因此它可以防止分层。根据静态LoadDeflection试验，该致动器可以在5V驱动时实现具有较近若干微体的幅度的双向致动。根据振动测试，致动器的动态不仅受到热特性而且由振动模式的影响。因此，当驱动接近40kHz时，热致动器仍然具有显着的输出。致动器经历了疲劳试验，其示出其谐振频率在10 {SUP} 9循环之后保持不变，其连续运行在2.25V {SUB}（PP）中的驱动电压。

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