The analysis of the influence of the auxiliary components on FBAR response

机译：辅助组分对FBAR响应的影响分析

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The future trend for wireless portable products is towards integration, size and cost reduction. With MEMS technologies, the thin film bulk acoustic wave resonator (FBAR) filters have the potentials to help fulfill these gpals. To further improve the performance of FBAR devices, auxiliary components such as inductors and capacitors are often used. This paper will discuss the effects of such components on the resonance frequency of FBAR and discuss the design of FBAR filters from a circuit viewpoint systematically. Based on ladder type filer and possible number and placements of auxiliary component, the impedance and S-parameter frequency responses can also be analyzed. The simulation results can help optimize the performance of filter or duplexer. The discussion and conclusion would be very helpful to the implementation of FBAR filter and duplexer.

机译：无线便携式产品的未来趋势是一体化，尺寸和成本降低。使用MEMS技术，薄膜散装声波谐振器（FBAR）滤波器有可能帮助满足这些GP的潜力。为了进一步提高FBAR设备的性能，通常使用诸如电感器和电容器的辅助部件。本文将讨论这些组件对FBAR谐振频率的影响，并系统地从电路视点讨论FBAR滤波器的设计。基于梯形档案文件和辅助部件的可能编号和放置，也可以分析阻抗和S参数频率响应。仿真结果有助于优化过滤器或双工器的性能。讨论和结论对FBAR过滤器和双工器的实施非常有帮助。

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《Nanotechnology conference and trade show》|2003年||共4页
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中图分类工程材料一般性问题;
关键词
thin film bulk acoustic wave resonator; wireless; filter;

机译：薄膜散装声波谐振器;无线;过滤器;

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The analysis of the influence of the auxiliary components on FBAR response

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