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首页> 外文会议>Conference on vertical-cavity surface-emitting lasers >142-nm electrostatically actauted tuning using surface-micromachined vertical air-cavity wavelength-selective elements for applications in 1.55μm VCSELs
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142-nm electrostatically actauted tuning using surface-micromachined vertical air-cavity wavelength-selective elements for applications in 1.55μm VCSELs

机译：使用表面微机械垂直的气腔波长选择元件在1.55μm的vcsels中使用表面微机械垂直空气腔波长选择元件，静电应调谐

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摘要

Surface-micromachined 1.55μm vertical-resonator-based devices, capable of wide, continuous, monotonic and kink-free tuning are designed, technologically implemented and characterized. Tuning is achieved by mechanically actuating one or several membranes in a vertical resonator including two ultra-highly reflective DBR mirrors. The tuning is controlled by a single parameter (actuation voltage). The two different layers composing the mirrors reveal a very strong refractive index contrast. Filters including InP/air-gap DBR's (3.5 periods) using GaInAs sacrificial layers reveal a continuous tuning of >9% of the absolute wavelength. Varying a reverse voltage (U=0 .. -3.2V) between the membranes, a tuning range up to 142nm was obtained by electrostatic actuation. The correlation of the wavelength and the applied voltage is accurately reproducible without any hysteresis. Appropriate miniaturization is shown to increase the mechanical stability and the effectiveness of spectral tuning by electrostatic actuation since the relative significance of the fundamental physical forces can be varied considerably by appropriate scaling. Model calculations are performed for symmetric and asymmetric optical filter structures, varying layer thickness and compositions. Finally the filter results are used to design micromachined tunable air-gap VCSEL's. Theoretical model calculations demonstrate very wide spectral tuning by micromachined actuation of air-gap VCSEL resonators.
机译：表面微磨1.55μm基于垂直谐振器的装置，设计，技术实施，特征设计和特征在于，能够广泛，连续，单调和扭结调谐。通过机械致动一个或多个垂直谐振器中的膜来实现调谐，包括两个超高反射DBR镜。调谐由单个参数（致动电压）控制。构成镜子的两个不同层揭示了一个非常强烈的折射率对比。包括InP / Air-Gap DBR（3.5周期）的过滤器，使用Gainas牺牲层显示了绝对波长的连续调谐> 9％。通过静电致动获得高达142nm的调谐范围改变反向电压（U = 0。-3.2V）。波长和施加电压的相关性无需任何滞后就精确地再现。示出了适当的小型化以增加通过静电致动的频谱调谐的机械稳定性和频谱调谐的有效性，因为基本物理力的相对意义可以通过适当的缩放显着变化。对对称和非对称滤光器结构进行模型计算，层厚度和组合物。最后，过滤器结果用于设计微机械的可调气隙VCSEL。理论模型计算通过微机械间VCSEL谐振器的微机械致动展示非常宽的光谱调谐。

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