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A Compact Ultrafast Capillary Plasma Discharge As an Intense XUV Source

机译：紧凑的超快毛细管等离子体放电作为强烈的XUV源

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A fast nanosecond capillary discharge for fast repetition rate operation has been designed and tested. Operated in Ar and Ar/He mixtures X-ray emission from ionization stages from Ar VIII to XII have been observed according to capillary dimensions and operating voltages. Intense electron beams are formed as a result of the transient hollow cathode effect. The emission characteristics are presented for capillaries of two lengths, 21 and 26 mm, and at three diameters, 0.8, 1.6 and 3.2 mm. In addition, time resolved observations allow comparison of theory and experiment of the emission in relation to the current and applied voltage. We find from the spectra a strong dependence on the capillary dimensions, capillary operating conditions such as voltage, gas mix and pressure, diameter and length with clear evidence of wall ablation under some conditions. This has important consequences on the long term reliability of the discharge. The energy output at 4.9 nm (Ar IX emission) and the in-band (13.5 nm 1%) is also presented.
机译：设计和测试了快速重复率操作的快速纳秒毛细管排放。在AR和AR / HE中操作在AR / HE中混合从AR VIII的离子化阶段发射来自AR VIII至XII，根据毛细管尺寸和操作电压观察到。由于瞬态空心阴极效应而形成强烈的电子束。发射特性呈现为两个长度，21和26mm，三径为0.8,1.6和3.2mm的毛细管。此外，解决时间分辨的观察结果允许比较与电流和施加电压有关的发射的理论和实验。我们发现光谱从毛细管尺寸的强烈依赖，毛细管操作条件如电压，气体混合和压力，直径和长度，在某些条件下具有清晰的壁消融证据。这对放电的长期可靠性具有重要影响。还提出了4.9nm（Ar IX发射）和带内的能量输出和带内（13.5nm 1％）。

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