TOMOGRAPHIC MICROINTERFEROMETRY AS A MEASUREMENT TOOL FOR 3D MICRO-OPTICAL PHASE ELEMENTS

机译：断层扫描微干扰法作为3D微光相位元素的测量工具

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This paper presents tomographic microinterferometry as a tool for determination of 3D refractive index distribution in optically transparent elements. Principles of method and exemplary results are obtained in laboratory system are given. Concept of insensitive for ambient influence field tomograph dedicated for fast determination of refractive index distribution is given. Decreasing of acquisition and computing time is achieved by reduction of number of views, for which measurements are taken. The influence of decreasing number of projection is analyzed in order to determine a certain compromise between the quality of n(x,y,z) reconstruction and time of measurement.

机译：本文介绍了切断微内交织物，作为用于测定光学透明元件中的3D折射率分布的工具。在给出了实验室系统中获得了方法和示例性结果的原理。给出了专门用于快速测定折射率分布的环境影响因素的概念。通过减少拍摄数量的次数来实现采集和计算时间的减少来实现。分析降低投影数量的影响，以便在N（x，y，z）重建和测量时间之间的质量之间确定一定的折衷。

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《Conference on interferonmetry: Applications》|2004年||共10页
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Pawel Kniazewski; Malgorzata Kujawinska; Witold Gorski; SPIE-The International Society for Otical Engineering; SPIE v.5532;
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正文语种
中图分类光学计量仪器;
关键词
optical metrology; tomographic microinterferometry; 3D refractive index distribution; optical fibers;

机译：光学计量;断层摄影微内交织物;3D折射率分布;光纤;

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TOMOGRAPHIC MICROINTERFEROMETRY AS A MEASUREMENT TOOL FOR 3D MICRO-OPTICAL PHASE ELEMENTS

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