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首页> 外文会议>International Conference on Multi-Material Micro Manufacture >Electrostatic Force for Self-alignment of Microparts and Its Dependence on Geometrical and Electrical Parameters
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Electrostatic Force for Self-alignment of Microparts and Its Dependence on Geometrical and Electrical Parameters

机译：用于微粉的自对准的静电力及其对几何和电气参数的依赖性

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摘要

This paper seeks to expand our previous understanding of the electrostatic interactions between pairs of complementary electrodes on a planar self-alignment/self-assembly platform. The total electrostatic field is composed of a homogeneous field between the electrodes and the fringe fields at their edges. An analytical function is provided to quantify the force of the homogeneous field and FEM simulations provide us not only with the total electrostatic force, but also with prediction rules for its maximum value and relative displacement as a function of the selected electrode diameter. Furthermore, the limitations of the analytical approach are analysed and a comparison of the measures of homogeneous and total force is made. The results are afterwards discussed, indicating a complex system of electrostatic interaction, greatly affected by geometric as well as electric parameters that need to be taken into account for the amelioration of the platform's design and performance.
机译：本文旨在扩展我们之前对平面自对准/自组装平台上的互补电极对之间的静电相互作用的理解。总静电场由电极和边缘处的边缘场之间的均匀场组成。提供了一种分析功能以量化均匀场的力，并且FEM模拟不仅为我们提供了总静电力，而且为其提供了最大值的预测规则和作为所选电极直径的函数的最大值和相对位移。此外，分析了分析方法的局限性，并进行了均匀和总力测量的比较。结果是讨论的，表明静电相互作用的复杂系统，几何影响以及需要考虑到平台的设计和性能的改善的电气参数。

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