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首页> 外文会议>International Conference on Multi-Material Micro Manufacture >Rapid and Autonomous Optical Characterization of Tool Diameter and Cutting Edge Radius on Micro End Mills
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Rapid and Autonomous Optical Characterization of Tool Diameter and Cutting Edge Radius on Micro End Mills

机译：微端铣床上的工具直径和切削刃半径的快速和自主光学表征

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摘要

A novel metrology method is presented for rapidly and autonomously characterizing the diameter and cutting edge radius of micro end mills using two-step optical imaging and image post-processing. This method is intended to improve on manual micro end mill geometry inspection methods in both measurement speed and repeatability. The two-step approach is used for finding the tool diameter and cutting edge radius values on two-flute 305.8-μm-diameter micro end mills: First, a low magnification and image post-processing step is used to find the tool diameter and cutting edge tip locations. The cutting edge tip locations are then used to perform a second high magnification imaging and image post-processing step to characterize the cutting edge radius values. This metrology system was used to measure a set of micro end mills and resulted in comparable measurements at an 85% reduction in measurement time and better measurement value compared with manual SEM imaging results.
机译：提出了一种新的计量方法，用于快速，自主地表征微端铣刀的直径和切割边缘半径，使用两步光学成像和图像后处理。该方法旨在改进测量速度和可重复性的手动微终研磨几何检测方法。两步方法用于查找双槽305.8-μm微端铣刀上的刀具直径和切削刃半径值：首先，使用低放大率和图像后处理步骤来找到工具直径和切割边缘尖端位置。然后，切削刃尖端位置用于执行第二高放大率成像和图像后处理步骤，以表征切割边缘半径值。该计量系统用于测量一组微终铣刀，导致测量时间减少85％和更好的测量值，与手动SEM成像结果相比，测量值为85％。

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