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首页> 外文会议>Annual Canadian Conference on Electrical and Computer Engineering >HIGH MECHANICAL BANDWIDTH POLYSILICON MICROMIRRORS FOR LARGE AREA/HIGH DEFLECTION ANGLE MICROMIRROR ARRAYS
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HIGH MECHANICAL BANDWIDTH POLYSILICON MICROMIRRORS FOR LARGE AREA/HIGH DEFLECTION ANGLE MICROMIRROR ARRAYS

机译：大面积/高偏转角微镜阵列的高机械带宽多晶硅微镜

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We demonstrate a new design for micromirror arrays that allow for high tilt angles (0.75°) of mirror elements in arbitrary directions, large actuated areas (0.64mm{sup}2), and high actuation bandwidth (measured resonant frequencies range from 100 to 450 kHz). This is achieved by subdividing each actuated mirror into several small submirrors that are addressed simultaneously, so that they behave as one large composite mirror. Submirrors increase the resonance frequency, surface area, and tilt angle of each composite mirror, at the expense of a slight reduction in fill factor. Different designs for the individual micromirrors were fabricated from polysilicon using standard surface micromachining technology (MUMPs) and characterized; a 5 × 5 array of composite mirrors was also fabricated and tested.
机译：我们展示了用于微镜阵列的新设计，其允许在任意方向上的镜子元件的高倾斜角度（0.75°），大致致动区域（0.64mm {sup} 2）和高致动带宽（测量的谐振频率范围为100到450千赫）。这是通过将每个致动镜子细分为同时寻址的几个小型子镜，使得它们表现为一个大型复合镜。由于填充因子的略微降低，子磨器增加了每个复合镜的谐振频率，表面积和倾斜角度。使用标准表面微机械技术（腮腺）的多晶硅制造各个微镜的不同设计，并表征;还制造和测试了5×5阵列复合镜。

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