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Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

机译：可见，近红外和短波红外光谱的薄膜吸收器

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In this study, the refractive indices were determined for Al_2O_3 films deposited with ALD, and amorphous Mo-Si-N films deposited with reactive sputtering. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. Based on the results, two thin film absorbers were designed and manufactured: one for wavelengths of 350…1000 nm, the other for wavelengths of 1200…2000 nm. The manufactured absorbers showed high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. One of the absorbers was applied to a MEMS thermopile detector with successful process integration.

机译：在该研究中，测定沉积有ALD的AL_2O_3膜和沉积有反应溅射的无定形MO-Si-N膜的折射率。通过光谱反射率，椭偏测量，GONIOREFORCTRY和双光束传递标准光谱法进行测量。基于该结果，设计和制造了两种薄膜吸收剂：波长为350 ... 1000nm，另一个用于1200 ... 2000nm的波长。制造的吸收剂在其整个工作光谱上显示出高的吸收，在最大值的93.4％下变化至99.9％。其中一个吸收剂用于具有成功的工艺集成的MEMS热电堆检测器。

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《Eurosensors Conference》|2009年||共4页
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作者
M. Laamanen; M. Blomberg; R. L. Puurunen; A. Miranto; H. Kattelus;
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原文格式 PDF
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中图分类 TP212-53;
关键词
Absorber; Infrared; ALD; Mo-Si-N; Refractive index; MEMS;

机译：吸收剂;红外;ald;mo-si-n;折射率;mems;

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专利

1. Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra [J] . Laamanen M., Blomberg M., Puurunen R.L., Sensors and Actuators, A. Physical . 2010,第2期

机译：薄膜吸收器，用于可见，近红外和短波长红外光谱
2. Frequency tunable perfect absorber in visible and near-infrared regimes based on VO2 phase transition using planar layered thin films [J] . Liang Jiran, Hou Luhui, Li Jingpeng Journal of the Optical Society of America, B. Optical Physics . 2016,第6期

机译：基于VO2相变的，使用平面分层薄膜的可见光和近红外条件下的频率可调完美吸收体
3. Surface Plasmon Coupled Fluorescence in the Visible to Near-Infrared Spectral Regions using Thin Nickel Films: Application to Whole Blood Assays [J] . Kadir Aslan, Yongxia Zhang, Chris D. Geddes Analytical chemistry . 2009,第10期

机译：使用薄镍膜在可见光到近红外光谱区域中的表面等离子体耦合荧光：在全血测定中的应用
4. Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra [C] . M. Laamanen, M. Blomberg, R. L. Puurunen, Eurosensors Conference . 2009

机译：可见，近红外和短波红外光谱的薄膜吸收器
5. Injection, transport, and ionic interactions of carriers in polyacetylene ionomers as probed by near-infrared absorbance and visible photoresponse. [D] . Walker, Ethan Michael. 2015

机译：通过近红外吸收和可见光响应探测，聚乙炔离聚物中载体的注入，运输和离子相互作用。
6. Control of light absorbance using plasmonic grating based perfect absorber at visible and near-infrared wavelengths [O] . Duc Minh Nguyen, Dasol Lee, Junsuk Rho -1

机译：使用基于等离激元光栅的完美吸收体在可见光和近红外波长下控制光吸收
7. Relationships between the Surface Fluxes at Grassland, Paddy Field, and at Copse, and Spectral Reflectances in Visible and in Near-infrared Wavelength or Vegetation Indices Derived from Satellite Remote Sensing. II. Relationship between Spectral Reflectances in Visible and in Near-infrared Wavelength Derived from Satellite and the Surface Fluxes. [O] . Atsushi HIGUCHI, Akihiko KONDOH 2000

机译：草地，稻田和COPSE的表面通量与近红外波长或近红外波长或卫星遥感植被指数之间的关系。 II。可见光和近红外波长源自卫星和表面磁通的频谱反射之间的关系。

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

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