The Study of Humidity Effect on Self-heated Surface Micromachined Polysilicon Resistor

机译：自加热表面微机械多晶硅电阻湿度效应研究

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摘要

Polysilicon is a very attractive material in microelectronics for thermal sensors. In this paper, the effect of humidity on thermal resistance of surface micromachined polysilicon is invested. It is found that the thermal conductivity variation of air due to humidity changes the suspended polysilicon resistor evidently. This property could be used as the working principle of relative humidity sensor.

机译：多晶硅是热电传感器微电子的非常有吸引力的材料。本文研究了湿度对表面微磁体热阻的影响。结果发现，由于湿度引起的空气的导热率变化会改变悬浮的多晶硅电阻。该物业可用作相对湿度传感器的工作原理。

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《Annual Conference of the Chinese Society of Micro-Nano Technology》|2011年||共4页
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作者
Hongyu Ma; Weidong Zhang; Enjie Ding;
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原文格式 PDF
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中图分类 TB3-532;
关键词
humidity; polysilicon; thermal conductivity;

机译：湿度;多晶硅;导热率;

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专利

1. TCR Sign Variation of Surface Micromachined Polysilicon Resistor under Joule Self-Heating [J] . HONGYU MA, LEI WANG, JING SONG Integrated Ferroelectrics . 2012,第Null期

机译：焦耳自热作用下表面微加工多晶硅电阻的TCR符号变化
2. TCR Sign Variation of Surface Micromachined Polysilicon Resistor under Joule Self-Heating [J] . HONGYU MA, LEI WANG, JING SONG Integrated Ferroelectrics . 2012,第Null期

机译：焦耳自热作用下表面微加工多晶硅电阻的TCR符号变化
3. TCR Sign Variation of Surface Micromachined Polysilicon Resistor under Joule Self-Heating [J] . Hongyu Maa Lei Wangb Jing Songb Weidong Zhanga, Enjie Dinga Integrated Ferroelectrics: An International Journal . 2012,第1期

机译：焦耳自热作用下表面微加工多晶硅电阻器的TCR符号变化
4. The Study of Humidity Effect on Self-heated Surface Micromachined Polysilicon Resistor [C] . Hongyu Ma, Weidong Zhang, Enjie Ding Annual Conference of the Chinese Society of Micro-Nano Technology . 2011

机译：自加热表面微机械多晶硅电阻湿度效应研究
5. A thick polysilicon surface micromachined accelerometer based on optical intensity modulation. [D] . Chen, Yi-Hsing. 1999

机译：基于光强度调制的厚多晶硅表面微机械加速度计。
6. Surface Chemistry and Humidity in PowderElectrostatics: A Comparative Study between Tribocharging and CoronaDischarge [O] . Karolina W. Biegaj, Martin G. Rowland, Tim M. Lukas, 2017

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7. Mechanical characterization of polysilicon cantilevers using a thermo-mechanical test chip fabricated with a combined bulk/surface micromachining technique [O] . F.J. Quiñones-N, F.J. De la Hidalga-W, M. Moreno, 2014

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8. Low-Voltage Rotary Actuator Fabricated Using a Five-Level Polysilicon Surface211 Micromachining Technology [R] . Jakubczak, Krygowski, Miller, 1999

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The Study of Humidity Effect on Self-heated Surface Micromachined Polysilicon Resistor

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