CUBIC: laboratory testing of 'thin poly' CCDs

机译：立方：'薄Poly'CCD的实验室测试

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CUBIC, the Cosmic Unresolved X-ray Background Instrument Using CCDs, is designed to make moderate resolution X-ray spectral measurements at spatial scales of a few degrees. While the energy range is nominally 200 eV - 10 keV, the CCDs have been designed to maximize the soft X-ray performance by using novel structures. The CUBIC CCDs, fabricated by Loral Fairchild, are 1024 $MUL 1024 pixels in size, with 18 $mu@m $MUL 18 $mu@m pixels. The CCDs use a new `thin poly' gate structure designed to maximize low energy quantum efficiency, while still retaining the advantages of front-side illumination and the high Charge Transfer Efficiency of a three-phase device. Being front-side illuminated, the design avoids the surface stability problems of backside illuminated devices. Fabrication of the first lot of CCDs and test structures has been completed, and we report laboratory camera testing of the CCDs at Penn State.

机译：立方体，宇宙未解决的X射线背景仪器使用CCD设计，用于在几度的空间尺度下进行适度的分辨率X射线光谱测量。虽然能量范围是标称200EV - 10 kev，但CCD旨在通过使用新颖结构来最大化软X射线性能。由Loral Fairchild制造的立方CCD尺寸为1024 $ MUL 1024像素，18 $ MU @ MUL 18 $ MU @ M像素。 CCDS使用旨在最大化低能量量子效率的新型`薄的Poly'栅极结构，同时仍然保持前侧照明的优点和三相装置的高电荷传递效率。正面照明，设计避免了背面照明设备的表面稳定性问题。已经完成了第一批CCD和测试结构的制造，我们报告了Penn状态的CCD的实验室摄像机测试。

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《Conference on EUV, x-ray, and gamma-ray instrumentation for astronomy》|1993年||共7页
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Mark A. Skinner; David N. Burrows; Gordon P. Garmire; Ralph P. Kraft; David H. Lumb; John A. Nousek;
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CUBIC: laboratory testing of 'thin poly' CCDs

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