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首页> 外文会议>International Conference on Advanced Materials Processing Technologies >STRESS AND ADHESION IN DLC COATINGS ON 316L STAINLESS STEEL DEPOSITED BY A NEUTRAL BEAM SOURCE
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STRESS AND ADHESION IN DLC COATINGS ON 316L STAINLESS STEEL DEPOSITED BY A NEUTRAL BEAM SOURCE

机译：中性光束源沉积的316L不锈钢的DLC涂层中的应力和粘附

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摘要

Diamond like carbon (DLC) films have been deposited on medical implant grade 316L stainless steel substrates using a saddle field source neutral beam deposition system. The deposition characteristics have been determined as a function of system parameters and it has been shown that the deposition rate is largely independent of chamber pressure. The film structure has been investigated using Raman spectroscopy and from the peak positions and intensities the sp{sup}3 content has been estimated to be ～20% maximum. No significant change with film pressure has been observed but higher anode currents may lead to higher sp{sup}3 content. The adhesion strength has been found to be inversely proportional to the residual stress and to increase at lower deposition pressures. At a source anode current of 0.6 A the adhesion is a monotonic function of pressure in the range examined whereas with 1.0 A source current the behaviour is more complex.
机译：使用鞍座场源中性光束沉积系统，已经沉积在医用植入级316L不锈钢基板上的金刚石（DLC）薄膜。已经确定了沉积特性作为系统参数的函数，并且已经示出了沉积速率在很大程度上独立于腔室压力。使用拉曼光谱和峰值位置和强度研究了薄膜结构，SP {SUP} 3含量估计最大为约20％。已经观察到薄膜压力的显着变化，但较高的阳极电流可能导致更高的SP {SUP} 3含量。已经发现粘合强度与残余应力成反比，并在较低的沉积压力下增加。在0.6的源极阳极电流下，粘附是在检查的范围内的压力的单调函数，而具有1.0源电流的行为更复杂。

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