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首页> 外文会议>IEEE Interantional Conference on Industrial Technology >Direct Measurement Method for Lattice Spacing on Regular Crystalline Surface Using Scanning Tunneling Microscope and Laser Interferometry
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Direct Measurement Method for Lattice Spacing on Regular Crystalline Surface Using Scanning Tunneling Microscope and Laser Interferometry

机译：使用扫描隧道显微镜和激光干涉法将晶格间距的晶格间距的直接测量方法

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This article describes the instrument used for direct measurement of the lattice spacing on regular crystalline surfaces using a scanning tunneling microscope (STM) as a detector and a phase modulation homodyne interferometer as the reference scale. It consists of a STM head with a YZ-axes tip scanner, a precise X-axis sample stage with flexure springs and interferometer optics. The three-dimensional atomic STM image of the crystalline surface can be obtained by combining the movements of the YZ-axes tip scanner and the X-axis sample stage. The displacement of the X-axis sample stage can be measured directly with the phase modulation homodyne interferometer, which can determine the optical path difference of a wavelength times integer with picometer resolution. To reduce the thermal deformation effects, the STM head and the sample stage were fabricated with low linear thermal expansion cast iron, the X-axis was selected as fast scanning and the measurement axis, and a thermo-stabilized cell with 0.05 K temperature fluctuation was employed. The lattice spacing on the crystalline surface can be determined from the number of lattice spacings along the X-axis in the atomic STM image and the measured displacement of the sample stage by the interferometer. To evaluate the instruments, the lattice spacing on the highly oriented pyrolytic graphite surface was measured. The operation of the instrument, experimental results and the evaluation of measurement uncertainties are discussed.
机译：本文介绍了使用扫描隧道显微镜（STM）作为检测器和相位调制型Homodyne干涉仪作为参考刻度来直接测量晶格间距的仪器。它由具有YZ-轴尖端扫描仪的STM头组成，具有弯曲弹簧和干涉仪光学器件的精确的X轴样品级。通过组合YZ轴尖端扫描仪和X轴样本阶段的运动，可以获得晶体表面的三维原子STM图像。可以直接测量X轴样本级的位移，该相位调制均外干涉仪可以确定具有微微计分辨率的波长乘以整数的光路径。为了减少热变形效果，用低线性的热膨胀铸铁制造STM头和样品阶段，选择X轴作为快速扫描和测量轴，以及0.05k温度波动的热稳定电池雇用。结晶表面上的晶格间隔可以从原子STM图像中的X轴的晶格间距的数量和由干涉仪测量样品阶段的测量位移来确定。为了评估仪器，测量晶格间隔在高度取向的热解石墨表面上。讨论了仪器的操作，实验结果和测量不确定性评估。

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