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Direct laser fabrication of blazed diffraction coupling gratings on single mode polymer waveguides

机译:单模聚合物波导的直接激光制造闪光衍射耦合光栅

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With the increasing interest in polymer integrated optical devices, techniques for fabrication of efficient polymer diffraction gratings are of critical importance to aid in coupling of light into and out of polymer waveguides [1-3]. We have been developing direct laser fabrication techniques for diffraction gratings and standard photolithographic techniques for polymer waveguides.
机译:随着对聚合物集成光学装置的兴趣越来越大,用于制造有效的聚合物衍射光栅的技术对于辅助光进出聚合物波导的偶联至关重要,以帮助偶联[1-3]。我们一直在为聚合物波导的衍射光栅和标准光刻技术开发直接激光制造技术。

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