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Performance evaluation of the activated carbon chemical filter in low humidity condition (Part 1)

机译:低湿度条件下活性炭化学过滤器的性能评价(第1部分)

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The gaseous contaminants have become a serious problem to be controlled in cleanrooms for LSI devices and LCD manufacture. Therefore more advanced environmental control, such as moisture control, is needed in cleanrooms. Chemical filters such as activated carbon are generally used as adsorbent to remove gaseous contaminants at circulation air processing of cleanroom. We evaluated removal performance of the activated carbon chemical filter for organic gases and ion ingredients in low humidity condition. Activated carbon chemical filter did not show a drop in removal performance for organic gas, acid gas, and basic gas in low humidity condition.
机译:气态污染物已成为LSI器件和LCD制造的洁净室中的严重问题。因此,在洁净室中需要更先进的环境控制,例如水分控制。诸如活性炭的化学过滤器通常用作吸附剂以在洁净室的循环空气加工下除去气态污染物。我们评估了在低湿度条件下的有机气体和离子成分的活性炭化学过滤器的去除性能。活性炭化学过滤器未显示出用于有机气体,酸性气体和低湿度条件的基础气体的去除性能下降。

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