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Airborne Molecular Contaminants Analysis / Evaluation Methods for Air Cleaning I Development of Analysis Methods and findings

机译:空气中的空气污染物分析/评估方法,用于空气清洁I的分析方法和调查结果

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Analytical methods for AMCs out-gassing, air and silicon wafer surface are reviewed. Out-gassing at room temperature can be evaluated with data at high temperatures. Some of ester phthalates are thermal-decomposed at above 200 deg C, and it causes inorganic P compounds which could not removed with vaporization. With out-gassing data, screening of good raw materials, processing conditions and construction methods for Si wafer carrier good cleanliness can be established. Determination Limit lower for AMCs in air and Si wafer surfaces has been improved, which could be applied to cleanliness evaluation for required level in ITRS 2003 version.
机译:综述了AMCS外放气,空气和硅晶片表面的分析方法。室温下的出水可以在高温下进行数据。一些酯邻苯二甲酸酯在200℃的高于200℃下热分解,使其导致无机P化合物,其无法通过蒸发除去。通过外出数据,可以建立筛选良好的原材料,加工条件和Si晶片载体的施工方法,可以良好清洁。空气和Si晶片表面中的AMCs的测定极限已经提高,这可以应用于ITRS 2003版本所需水平的清洁度评估。

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