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首页> 外文会议>Conference on MEMS/MOEMS Technologies and Applications >Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications
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Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications

机译：用于WDM应用的静电可调式INP的FABRY-PEROL滤波器的设计考虑因素

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The use of micromachined tunable Fabry-Perot interferometers based on compound semiconductors with an integrated photodetector have earlier been proposed [1-3] for fiber optic communications employing Wavelength Division Multiplexing (WDM) for wavelengths around 1.55 μm. The variation of the Fabry-Perot cavity length in these devices is achieved by electrostatic actuation induced movements of a Distributed Bragg Reflector (DBR) mirror suspended by beams. A new filter design has been proposed and its electrostatic actuation induced deflection has been investigated along with three different filter designs using Finite Element Analysis (FEA). Using a mathematical model, deflection is analytically calculated and compared with FEA results. Due to the way in which the mirror is integrated with suspending framework of beams, bending within the mirror during actuation cannot be averted. The filter's optical performance demands that mirror remain so flat that the maximum bending deflection is 1 nm for the mirror of given dimensions. Using a criterion based on mechanical and optical considerations the length of the beams suspending the mirror has been optimized for each of filter designs under investigation.
机译：已经提前使用基于具有集成光电探测器的化合物半导体的微机械可调谐法布里 - 珀罗干涉仪进行[1-3]，用于采用波长为1.55μm的波长的波分复用（WDM）的光纤通信。通过悬挂在梁悬挂的分布布拉格反射器（DBR）镜的静电致动诱导的运动来实现这些装置中的法布里 - 珀罗腔长的变化。已经提出了一种新的过滤器设计，并且通过有限元分析（FEA），研究了其静电驱动诱导的偏转以及三种不同的过滤器设计。使用数学模型，与FEA结果进行了分析并将偏转进行了计算。由于镜子与悬挂梁的悬挂框架集成的方式，在致动期间镜子内弯曲不能避免。过滤器的光学性能要求镜像保持得如此平坦，即给定尺寸的镜子最大弯曲偏转为1nm。利用基于机械和光学考虑的标准，已经针对正在研究的每个过滤器设计进行了优化悬挂镜子的光束的长度。

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