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首页> 外文会议>Conference on MEMS/MOEMS Technologies and Applications >Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators
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Mechanism and experiment study on photothermally excited bilayer silicon microcantilever resonators

机译：光热激发双层硅片谐振器的机制与实验研究

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Silicon micro-cantilever resonators are typical elements in micro-electro-mechanical systems. Basing on the photothermally excited micro-cantilever resonators, many optical microsystems can be realized, such as micro-swichtes,mciro-modulators and microsensors etc. In this paper, mechanism and experiment study is given on photo-thermally excited bi-layered silicon micro-cantilever resonators, and relative results can be served as the basis of further applications. When coating is put on the surface of micro-cantilever to increase the optically exciting efficiency, the whole resonator becomes bi-layered structure, and the mechanism of this bi-layered resonator is very different from those of single material resonators. In this paper, photo-thermally excited mechanism of bi-layered silicon micro-cantilever was presented and a corresponding photo-thermal theoretical model was set up based on the photo-thermal effect. The first three resonant modes of the silicon micro-cantilever were detected successfully by using piezoelectric resistors fabricated as a Wheat-stone sensing bridge on the micro-cantilever. A novel method was presented to excite and detect the microresonator at the same time by using only one optical source , and this novel method was demonstrated by detecting the first resonant mode of the micro-cantilever.
机译：硅微悬臂梁谐振器在微机电系统的典型元件。基础上的光热激发微悬臂梁谐振器，许多光学微可以实现，如微swichtes，mciro调制器和微传感器等。在本文中，机制和实验研究对激发光热双层硅微给出-cantilever谐振器，和相对的结果可作为进一步的应用的基础。当涂层被置于微悬臂梁的表面上以提高光学效率令人兴奋，整个谐振器成为双层结构，并且该双层谐振器的机构是从这些单一材料谐振器的很大不同。在本文中，双层硅微悬臂梁的光热激发机制被提出和对应的光热理论模型建立了基于光热效应。通过使用压电电阻器成功检测到硅微悬臂梁的前三个谐振模式制造为在微悬臂梁一个小麦石传感桥。提出一种新的方法来激励，并通过使用仅一个光源检测的同时微谐振器，并且这新颖的方法是通过检测所述微悬臂梁的第一谐振模式证明。

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