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Optical performance of 4*4 MEMS optical switches

机译：光学性能为4 * 4 MEMS光开关

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Optical switches made with Micro-electro-mechanical Systems (MEMS) technology bear advantages of both MEMS and traditional optics. It is of very importance to control position misalignments and angular misalignments, which have heavy effects on insertion loss of the MEMS optical switches. In this paper, a 4*4 MEMS optical matrix switches is proposed, in which on-off micro-mirrors are arranged with Crossbar switching network. Ball-lensed single-mode optical fiber collimators are used as input and output ports. With overlap integral calculus theory of Gaussian beams coupling, the insertion loss of the optical matrix switches, and also its main origins, i.e. the position misalignments and the angular misalignments, are calculated and analyzed. Some useful conclusions are drawn to guide designing such devices. As for the misalignments tolerances: 2μm of input/output lateral positioning misalignment, 0.15°or input/output angular misalignment, and 0.15°or micro-mirror angular misalignment, the insertion loss of the pilot study are 2.77dB for the highest value.
机译：用微电机械系统（MEMS）技术制造的光学开关具有MEMS和传统光学的优点。控制位置未对准和角度错位非常重要，这对MEMS光学开关的插入损耗具有很大的影响。在本文中，提出了一种4 * 4 MEMS光学矩阵开关，其中开关微镜与横杆交换网络布置。滚珠丝杠单模光纤准直器用作输入和输出端口。利用高斯光束耦合的重叠积分微积分理论，计算和分析了光学矩阵开关的插入损耗，即其主要来源，即位置未对准和角度错位。绘制了一些有用的结论来指导设计这些装置。至于错位公差：2μm的输入/输出横向定位未对准，0.15°或输入/输出角度未对准，以及0.15°或微镜角度未对准，导频研究的插入损耗为2.77dB的最高值。

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