This paper reports a design and fabrication of micro scanner for optically modulated fiber endoscopes of medical use that are not powered through electrical wires but with a photovoltaic cell. MEMS optical scanners are becoming a key component to develop miniaturized fiber optic endoscope for in vivo diagnosis). Most MEMS scanners reported are electrostatically actuated, and hence they require electric wires for conducting drive voltage. Unlike the conventional ones, we have recently proposed an optically modulated fiber endoscopes, in which a MEMS optical scanner is optically energized by a co-located photovoltaic cell. Thanks to the newly developed optical modulation system, the risk of electrical leakage to human body or electrical interference to other medical instruments is minimized.
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