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Nanostructured metallic electrodes for optoelectronic devices

机译:用于光电器件的纳米结构金属电极

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Recently, arrays of subwavelength slits or holes in metal films have attracted a lot of interest due to the anomalously high transmission of light. The properties of the transmission resonances can be controlled by the periodicity and the width and height of the slits/holes in the array. Our aim is to employ the plasmonic effects in the design of metal-semiconductor-metal (MSM) photodetectors and light emitting diodes. Using the interaction between light and plasmonic resonances in periodically structured metals allows to overcome the effect of shading of the active device area which is the major drawback of metallic top electrodes. With this approach an efficient and homogeneous injection and extraction of the carriers in the devices should be achievable. In MSM detectors with interdigitated electrodes forming a 1D metallic grating, additionally the carrier drift time in the semiconductor structure below the electrodes is decreased and high speed response can be obtained. As the localized plasmons in 1D metallic gratings can be excited only by light polarized perpendicular to the slits (TM polarization) the properties of such devices will be polarization dependent. To model the properties of multilayered patterned structures with dispersive components we use the scattering matrix method. Fig. 1 shows the calculated transmission spectra of a structure consisting of a GaAs/AlAs waveguide on a GaAs substrate and a 1D gold grating on top (cf. inset). As the metal thickness is increased the transmission is increasing, reaching a maximum of 95% at a photon energy of 1345 meV for a thickness of 170 nm.
机译:最近,由于光的异常高透射,亚波长狭缝或金属膜的孔的阵列引起了很多感兴趣。可以通过周期性和阵列中的狭缝/孔的周期性和宽度和高度来控制变速器谐振的性质。我们的目的是在金属半导体 - 金属(MSM)光电探测器和发光二极管的设计中采用等离子体效应。在周期性结构金属中使用光和等离子体谐振之间的相互作用允许克服主动装置区域的阴影的效果,这是金属顶电极的主要缺点。通过这种方法,应可以实现有效且均匀的注射和提取装置中的载体。在具有形成1D金属光栅的互通电极的MSM探测器中,另外,电极下方的半导体结构中的载流子漂移时间降低,并且可以获得高速响应。由于1D金属光栅中的局部示例性可以仅通过垂直于狭缝(TM偏振)的光偏振,因此这种装置的性质将是偏振的。利用分散组分模拟多层图案结构的特性,我们使用散射矩阵法。图。图1示出了由GaAs衬底上的GaAs / Ala波导组成的结构的计算透射光谱和顶部的1D金光栅(CF.插图)。随着金属厚度的增加,变速器增加,在1345meV的光子能量下达到最大95%,厚度为170nm。

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