300mm and 450mm Standard Calibration Wafers - A Standard Tool for Semiconductor Metrology Calibration and Matching

机译：300mm和450mm标准校准晶片 - 半导体计量校准和匹配的标准工具

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Metrology tool companies, as well as Semiconductors manufacturers are sharing the same problem: Is 'my' Metrology tool calibrated? The tool manufacturer would like to know if the tool met the expected performances and is ready to be delivered; the IC manufacturers would like to ensure that a tool is ' back in spec', after PM. Both would like to compare tool-to-tool and even Fab-to-Fab performances.

机译：Metology工具公司，以及半导体制造商正在共享同样的问题：是'我的'Metrology Tool Calibrated？该工具制造商想知道该工具是否符合预期的性能，并已准备好送达; IC制造商希望在PM之后确保工具“返回规格”。两者都希望比较工具到工具甚至Fab-fab表演。

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《International Conference on Frontiers of Characterization and Metrology for Nanoelectronics》|2015年||共2页
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Rand Cottle; Menachem Shoval; Yuval Agami; Frank Tolic; Stephen Bennett; Martin Rodgers;
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中图分类 TB973-53;
关键词
450mm; metrology; SPC; calibration; reference standards; semiconductor; IC; CD; ellipsometry; inspection;

机译：450mm;计量;SPC;校准;参考标准;半导体;IC;CD;椭圆测定法;检查;

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机译：基于F-1反应器和标准校准设施的标准中子源-用于确定充气电离室灵敏度的有效工具
2. Test procedures for Class E_1 weights at the Romanian National Institute of Metrology: Calibration of Mass standards by sub- Division of the kilogram [J] . Adriana Vialcu Bulletin de l'Organisation Internationale de Metrologie Legale . 2001,第3期

机译：罗马尼亚国家计量学院E_1级砝码的测试程序：按千克划分的质量标准校准
3. Mutual recognition of national measurement standards and calibration certificates issued by national metrology institutes [J] . PTB Mitteilungen . 1998,第3期

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4. 300mm and 450mm Standard Calibration Wafers - A Standard Tool for Semiconductor Metrology Calibration and Matching [C] . Rand Cottle, Menachem Shoval, Yuval Agami, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics . 2015

机译：300mm和450mm标准校准晶片 - 半导体计量校准和匹配的标准工具
5. Financial Resources and Technology to Transition to 450mm Semiconductor Wafer Foundries [D] . Pastore, Thomas Earl 2014

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6. Determination of Albumin Glucose and Creatinine Employing a Single Sequential Injection Lab-at-Valve with Mono-Segmented Flow System Enabling In-Line Dilution In-Line Single-Standard Calibration and In-Line Standard Addition [O] . Kanokwan Kiwfo, Wasin Wongwilai, Tadao Sakai, 2020

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7. Benefits of on-wafer calibration standards fabricated in membrane technology [O] . M. Rohland, U. Arz, S. Büttgenbach 2011

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8. New Five-Standard Calibration Procedures for Network Analyzers and Wafer Probes [R] . Silvonen, K. 1994

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300mm and 450mm Standard Calibration Wafers - A Standard Tool for Semiconductor Metrology Calibration and Matching

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