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首页> 外文会议>International Conference on Frontiers of Characterization and Metrology for Nanoelectronics >Off-Specular X-ray and Neutron Reflectometry for the Structural Characterization of Buried Interfaces
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Off-Specular X-ray and Neutron Reflectometry for the Structural Characterization of Buried Interfaces

机译：用于埋地界面的结构表征的折射镜面X射线和中子反射率

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Off-specular reflectivity or diffuse scattering is sensitive to lateral compositional variations at surfaces and interfaces. It is particularly well-suited as a means of measuring the form and amplitude of surface roughness, as well as separating contributions from physical roughness and gradients in material density. The roughness and lateral correlation lengths of model rough surfaces were cross-correlated using neutron and x-ray off-specular reflectivity (OSNR and OSXR, respectively), and using power spectral density (PSD) analysis of atomic force microscopy (AFM) data. These experiments highlight the advantages of the technique for the investigation of buried interfaces while illustrating how x-ray and neutron techniques work complementarily to measure interfacial roughness.
机译：折叠镜面反射率或漫射散射对表面和界面的横向组成变化敏感。特别适合作为测量表面粗糙度的形式和幅度的方法，以及分离从物理粗糙度和材料密度的梯度的贡献。模型粗糙表面的粗糙度和横向相关长度使用中子和X射线偏离镜面反射率（分别为OSNR和OSXR）和原子力显微镜（AFM）数据的功率谱密度（PSD）分析来交叉相关。这些实验突出了该技术的优点，用于调查掩埋界面，同时说明如何互补地互补地用于测量界面粗糙度。

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